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Nearfield Instruments and the EIC Accelerator: Grant for a $1.6B Firm

September 30, 2026900 words5 min

Nearfield Instruments, a spin-off of the Dutch research institute TNO based in Rotterdam and led by co-founder and chief executive Hamed Sadeghian, makes metrology and inspection machines that chipmakers use to measure structures on wafers during production, based on high-throughput atomic force microscopy. Its EIC Accelerator project, AUDIRA, "Non-Destructive Fully Automated Subsurface Metrology and Inspection for the Semiconductor Industry", receives an EU contribution of €2,496,499 and ran from November 2024 to April 2026, according to CORDIS. It aimed to take AUDIRA, a machine that measures features buried under opaque wafer layers by "listening" to sound waves with an AFM probe, from technology readiness level 5 to 8.

In its application, Nearfield described itself as "the only European organization offering advanced metrology and inspection solutions" for chipmakers, with more than 160 staff, 71 patents and commercial relationships with Samsung, Intel and TSMC, and forecast break-even in 2026. Three days after the EIC selection, in July 2024, it closed a €135 million Series C led by Walden Catalyst and Temasek, according to Nearfield Instruments. In June 2026 it raised $380 million at a $1.6 billion valuation, led by Fidelity, with the Qatar Investment Authority joining, the largest deep-tech round in the Netherlands, according to Nearfield Instruments.

$1.6BValuation, June 2026
$380MSeries D
160+Staff at EIC application
NonePublic AUDIRA project report

Company file

Legal entity
Nearfield Instruments B.V., Rotterdam
Origin
Spin-off of TNO
CEO
Hamed Sadeghian, co-founder
Chairman
Eric Meurice, former CEO of ASML
Products
QUADRA (in production fabs), AUDIRA (subsurface)
Investors
Fidelity, Temasek, Walden Catalyst, M&G, Innovation Industries, Invest-NL, QIA, TNO Ventures, ING
EIC funding
Blended finance, €2.5M grant

Where Nearfield Stands Now

Nearfield's business runs on QUADRA, a 3D metrology system that it says was "fully integrated into the first major high-volume semiconductor manufacturing fab" by July 2024. In December 2024 it announced repeat QUADRA orders from a leading chipmaker that filled its 2025 order book, according to Nearfield Instruments. It has offices in Japan, South Korea, the US, Singapore and Taiwan. The Series D will fund application centres, production capacity and customer support. Its Dutch accounts were not accessible in free sources.

"This highly successful funding round marks a defining moment in our journey."

Hamed Sadeghian, co-founder and CEO, June 2026

The Technology: Listening Through a Wafer

AUDIRA combines an acoustic microscopy technique with Nearfield's AFM: the probe picks up sound waves reflected from layers inside the chip, revealing buried features and defects such as voids without cutting the wafer, according to Nearfield's July 2023 launch announcement. The company said it would complement transmission and scanning electron microscopy for process control. AUDIRA had been launched as a product eight months before the EIC cut-off.

What the EIC Award Promised, and What the Record Shows

The project closed in April 2026, but CORDIS shows no results report, and Nearfield has not announced an AUDIRA customer, order or production milestone. Its 2026 Series D release names QUADRA's markets and new architectures but not AUDIRA. Whether AUDIRA reached TRL 8 cannot be checked.

  1. AUDIRA to TRL 8UnverifiedNo report.
  2. AUDIRA customersNone announcedCompany news.
  3. Company growthStrong$380M Series D.
  4. Break-even in 2026UnverifiedNo accounts.

The Money

Nearfield raised €135 million and $380 million in its two most recent rounds. The EIC grant of €2.5 million is under 2% of the Series C alone. No EIC Fund investment has been announced. The case raises a question about additionality: whether a company that was simultaneously closing a nine-figure round needed the EIC's scarce grant money.

What Cannot Be Checked

Questions for the EIC

Why the EIC funded a company raising €135 million in the same month, whether the EIC Fund invested, what AUDIRA achieved during the project, and whether Nearfield reached break-even in 2026 are not public.

Why Europe Should Care

Nearfield calls itself the only European player in advanced metrology and inspection. A strong Dutch supplier next to ASML matters for Europe's chip ambitions. That is an argument for its investors, who have backed it heavily, more than for a small EIC grant.

What the award promised

A mature, fully automated subsurface metrology machine at TRL 8.

What the record shows

A booming QUADRA business, no public AUDIRA results.

The Verdict

Success story, unclear grant

Nearfield is one of Europe's deep-tech winners. What €2.5 million of EIC money added is not on the record.

Nearfield Instruments and the EIC have not been asked for comment for this article. It is based entirely on public records and published statements, linked throughout.

Industry

Electronics and semiconductorsSemiconductors

Focus
  • Semiconductor manufacturing equipment
Technologies
  • Microscopy
  • Acoustic engineering
Keywords
  • Wafer metrology
  • Subsurface inspection
  • Chip manufacturing
  • Defect detection
  • Atomic force microscopy
  • Acoustic imaging

Start with the EIC Accelerator

Expert review for Step 1 and Step 2, suitability assessment and grant screening.

Eureka Network

Eureka Network offers multiple international collaborative R&D programs including Network Projects, Clusters, Eurostars, Globalstars, and Innowwide, with funding ranging from €50K to €6.75M per project depending on the specific program. The network focuses on market-driven innovation and deep-tech development across diverse technology sectors including ICT/Digital, Industrial/Manufacturing, Bio/Medical Technologies, Energy/Environment, Quantum, AI, and Circular Economy. Applicants include SMEs, large enterprises, research organizations, universities, and startups, with Eurostars specifically targeting R&D-performing SMEs.

EIC Transition

EIC Transition provides up to €2.5 million in funding to bridge the 'valley of death' between laboratory research and market deployment, focusing on technology maturation and validation. The program supports single legal entities or small consortia of 2-5 partners including SMEs, start-ups, spin-offs, and research organizations. Technology areas include Health/Medical Technologies, Green/Environmental Innovation, Digital/Microelectronics, Quantum Technologies, and AI/Robotics.

EIC STEP Scale-Up

EIC STEP Scale-Up offers substantial equity investments of €10-30 million for established deep-tech companies ready for hyper-growth and large-scale expansion. The program targets SMEs or small mid-caps with up to 499 employees who have secured pre-commitment from qualified investors. Focus areas include Digital & Deep Tech (Semiconductors, AI, Quantum), Clean Technologies for Net-Zero goals, and Biotechnologies.

EIC Pre-Accelerator

EIC Pre-Accelerator is a pilot program providing €300,000-€500,000 in funding for early-stage deep-tech development and preparation for the EIC Accelerator program. The initiative is exclusively available to single SMEs or small mid-caps from 'Widening countries' to support regional innovation development. The program covers deep-tech innovations across physical, biological, and digital domains.

EIC Advanced Innovation Challenges

EIC Advanced Innovation Challenges is a new pilot program offering €300,000 (Stage 1) and up to €2.5 million (Stage 2) for breakthrough deep-tech solutions through ARPA-style staged funding with demand-side integration. The program targets single entities or small consortia (2-3 partners) including SMEs, start-ups, and research organizations. Focus areas include Physical AI for autonomous robotics and New Approach Methodologies (NAMs) for animal-free biomedical testing, requiring TRL 4 entry with end-user commitment.

EIC Pathfinder

EIC Pathfinder offers up to €3 million for Open calls and up to €4 million for Challenge-based calls to support early-stage research and development with proof-of-principle validation. The program requires research consortia with a minimum of 3 partners from 3 different countries, including universities, research organizations, and SMEs. Technology focus areas include Health/Medical, Quantum Technologies, AI, Environmental/Energy, and Advanced Materials.

EIC Accelerator

EIC Accelerator provides flexible funding options including blended finance (€2.5M grant + €0.5M-€10M equity), grant-only (up to €2.5M), or equity-only arrangements for scale-up and market deployment of breakthrough innovations. The program targets SMEs, start-ups, and small mid-caps with up to 499 employees, with MedTech/Healthcare representing 35% of funded projects. Other technology areas include Biopharma, Energy, AI, Quantum, Aerospace, Advanced Materials, and Semiconductors.

Innovation Partnership

Innovation Partnership facilitates collaborative innovation between public and private sectors with typical funding of €1-5 million per project. The program supports cross-sectoral strategic technologies through public-private partnerships and consortia. Projects focus on addressing societal challenges through collaborative innovation approaches.

Innovation Fund

The EU Innovation Fund provides substantial funding of €7.5 million to €300 million for large-scale demonstration of innovative low-carbon technologies. The program targets clean energy, carbon capture, renewable energy, and energy storage technologies to accelerate the transition to a low-carbon economy. Applicants include large companies, consortia, and public entities capable of implementing large-scale demonstration projects.

Innovate UK

Innovate UK offers various programs with funding ranging from £25K to £10M depending on the specific initiative, supporting business-led innovation, collaborative R&D, and knowledge transfer. The organization funds projects across all sectors with particular focus on emerging technologies and supports UK-based businesses, research organizations, and universities. Programs are designed to drive economic growth through innovation and technology commercialization.

Industrial Partnership

Industrial Partnership provides €2-10 million in funding for industrial research and innovation partnerships focusing on manufacturing, industrial technologies, and digital transformation. The program supports industrial consortia and research organizations in developing collaborative solutions for industrial challenges. Projects aim to strengthen European industrial competitiveness through strategic partnerships.

Eurostars

Eurostars is a joint EU-Eureka program offering €50K-€500K for international R&D collaboration specifically led by SMEs. The program takes a bottom-up approach, accepting projects from all technology fields without predefined thematic restrictions. R&D-performing SMEs must lead the consortium and demonstrate significant R&D activities.

LIFE Programme

The LIFE Programme provides €1-10 million in funding for environmental protection, climate action, and nature conservation projects across the European Union. The program supports environmental technologies, climate adaptation strategies, and biodiversity conservation initiatives. Applicants include public authorities, private companies, NGOs, and research institutions working on environmental and climate challenges.

Neotec

Neotec is a Spanish program offering €250K-€1M in funding for technology-based business creation and development, supporting the growth of innovative Spanish SMEs and start-ups. The program covers all technology sectors and aims to strengthen Spain's technology ecosystem. Funding is specifically targeted at Spanish technology-based SMEs and start-ups to enhance their competitiveness and market presence.

Thematic Priorities

EU Thematic Priorities encompass various programs aligned with EU strategic priorities including green transition, digital transformation, health, and security initiatives. Funding amounts vary based on the specific program and call requirements, with projects designed to address key European challenges. Applicant eligibility varies by specific program and call, with different requirements for different thematic areas.
EIC AcceleratorBeneficiary Deep Dive#Nearfield Instruments#semiconductors#metrology#chip manufacturing#deep tech#Netherlands
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